Liu, Xing; Zhang, Dawei; Zeng, Xuanqi; Zhang, Kaiyu; Liu, Peng; Weng, Tsu-Chien

SEVENTH ASIA PACIFIC CONFERENCE ON OPTICS MANUFACTURE (APCOM 2021)

2022, 12166, 0277-786X

Liu, Xing; Zhang, Dawei; Zeng, Xuanqi; Zhang, Kaiyu; Liu, Peng; Weng, Tsu-Chien

X-ray spectroscopy is an important technique for studying the material electronic structure, oxidation state and coordination, which have wide applications in energy catalysis, environmental science fields. The crystals diffract X-rays because their internal atoms are spatially ordered and the lattice spacing is on the nanometer scale, which is similar to the X-ray wavelength. In this paper, a technique based on bending and epoxy adhesive is proposed to fabricate a bent crystal analyzer. The radius of convex surface is 1% smaller than the concave one. The wafers and spherical substrates were cleaned with acetone and ethanol in an ultra-clean room. To remove residual organic compounds, UV ozone cleaning procedure should be used. The results show that the measured curvature radius of the bent crystal analyzer is 1000.550 mm; the surface RMS of the surface is 1.34 lambda and the energy resolution is better than 5 eV, which can distinguish Cu K alpha(1) and K alpha(2) fluorescence lines.