Precision fabrication of diamond micro-optic elements with hybrid SiO2/Cr etching masks
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作者
Yang, Zhiqi; Zhu, Ruixue; Zhang, Kaiyu; Yang, Xiaowei; Liu, Xing; Weng, Tsu-chien
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刊物名称
MICROELECTRONIC ENGINEERING
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年、卷、文献号
2022, 262, 0167-9317
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关键词
Yang, Zhiqi; Zhu, Ruixue; Zhang, Kaiyu; Yang, Xiaowei; Liu, Xing; Weng, Tsu-chien
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摘要
Diamond is opted for high-power optical systems due to excellent optical transparency, radiation, and thermal resistance, while the fabrication of micro-structures on diamond falls behind. Here we report a reliable fabri-cation method of diamond and fabricate a laminar grating with 2.90 mu m period and 3.08 mu m groove depth by directly laser writing(DLW) and reactive ions etching (RIE). We presented a micro-masks-less and high-temperature hybrid masks of diamond etching with dielectric SiO2 mask and Cr adhesive layer. We developed a statistical analysis method using Hough transform on SEM images, which could provide the quantitative results and monitor the variation of structures during fabrication process. The grating presents 28% diffraction efficiency in the 0th order and 9% in the +/- 1st order at 405 nm wavelength. The results of diffraction experiment are in close agreement with the rigorous coupled wave (RCWA) simulation.
