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Growth Behaviors of GaN on Stripes of Patterned c-Plane GaN Substrate
  • 作者
    Wu, Peng; Liu, Jianping; Jiang, Lingrong; Hu, Lei; Ren, Xiaoyu; Tian, Aiqin; Zhou, Wei; Ikeda, Masao; Yang, Hui
  • 刊物名称
    NANOMATERIALS
  • 年、卷、文献号
    2022, 12,
  • 关键词
    Wu, Peng; Liu, Jianping; Jiang, Lingrong; Hu, Lei; Ren, Xiaoyu; Tian, Aiqin; Zhou, Wei; Ikeda, Masao; Yang, Hui
  • 摘要
    Growth behaviors of GaN on patterned GaN substrate were studied herein. Spiral and nucleation growth were observed after miscut-induced atomic steps disappeared. The morphology of nucleation growth at different temperature is explained by a multi-nucleation regime introducing critical supersaturation. Simulated results based on a step motion model successfully explain the growth behaviors on stripes. These findings can be applied to control the surface kinetics of devices such as laser diodes grown on patterned substrate.

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